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Design of Vibratory MEMS Gyroscope with Crab Leg Flexure Anchors for High Sensitivity

Journal Name:

  • International Journal of Science and Engineering Investigations

Publication Year:

  • 2017

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Abstract (2. Language): 
A Highly sensitive MEMS Gyroscope is proposed in this paper with the translational axis being along Z-axis. A comparative study of the designs in terms of sensitivity and displacement. Eigen frequency analysis is being carried out for frequency tuning of sense mode and drive mode to increase the sensitivity. Here we are trying to match the two mode frequencies for the same. With reference to change in its mechanical structure, there is a change in displacement when a dc voltage is applied and the quadrature error in the micro machined vibrating is also minimized. The design is modified and the mechanical structure dimensions are chosen such that sensitivity varies with the addition of serpentine beams.The simulation results predict the resonant frequency to be very low indicating high sensitivity for frequencies of the order of 10 KHz to 2.82 KHz. With still more variations in the design parameters such as the length of serpentines, the resonant frequencies of drive and sense mode changes with respect to change in input angular moment in the Z-direction. In our designs of structures the resonant frequencies varies from 10KHz to 2.8 KHz. Resonant frequencies of a design play a major role in increasing the sensitivity of the device. The Bandwidth is around 200 Hz with displacement of 0.01 microns. The applied dc voltage is 10V and the ac voltage being 2 V along the plates. In this paper we are also discussing about the displacements for various structures along with the frequency analysis.
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REFERENCES

References: 

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International Journal of Science and Engineering Investigations, Volume 6, Issue 62, March 2017 212
www.IJSEI.com Paper ISSN: 2251-8843 ID: 66217-26
[7] Xie, H. and Fedder , G. (2003). "Integrated Microelectromechanical Gyroscopes." J. Aerosp. Eng., 10.1061/(ASCE)0893-1321(2003)16:2(65), 65-75.
[8] Design and Simulation of MEMS Based Gyroscope Sujit Kumar, B. Hemalatha Department of Instrumentation and Control Engineering, SRM University, KattankulathurChennai, Tamilnadu-603203, India
[9] Design and Simulation of MEMS Based Gyroscope Sujit Kumar, B. Hemalatha Department of Instrumentation and Control Engineering, SRM University, KattankulathurChennai, Tamilnadu-603203, India
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