Basham, D., Wright, J.W, Fergusan, K.I ve Moy, G.W.( 2004), Design: Clean
rooms, UFC 4-310-02N, MIL-HDBK-1028/SA.
Bilhaut, L. ve L. Duraffourg (2009), Assesment of nanosystems for space
applications. Acta Astronautica, in press, corrected proof.
Coffey, D.E., (2002), High efficiency particulate air (HEPA) fitler generation,
characterization and disposal experiences at the Oak Ridge National Laboratory.
WM202 Conference. Feb. 24-28.
Clean Room and Work Station Requirements (2007), Controlled Environments.
Fleddermann, C.B. ve Bradshaw, M.D. (Çev.E. Akın),(2003), Elektrik ve
Bilgisayar Mühendisliğine Giriş, Nobel Yayın, Ankara.
Foulke, E. G., (2007), Safeguarding equipment and Protecting Employees from
Amputations. OSHA (Occupational Safety and Health Administration), Small
Business Safety and Health Management Series.
Geng, H., (2005), Semiconductor Manufacturing Handbook, Chapter 38, Pavlotsky,
R. V. ve Beck, S.C., Cleanroom Design and Costruction. McGraw-Hill Book, New
York.
Gommel, U. (2009), Maximizing benefits of clean manufacturing and technical
cleaning advancements in automotive production. CleanRooms Europe.
Groover, M. P., (2007), Fundamentals of Modern Manufacturing. John Wiley and
Sons, Inc., New York.
Honbori, I., Katu , Y. ve Kisakibaru, T. (1994), Development of highly efficient fan
filter system for clean rooms. International Symposium on Semiconductor
Manufacturing.
Osman YAZICIOĞLU, Şeref AYKUT
54
Hu, S.C. ve Chuah, Y.K., (2003) Power consumption of semiconductor fabs in
Taiwan. Energy (28) 895-907.
ISO, (2005), Standards for classification of clean rooms.
Kalpakjian, S. and Schmid,S. R., (2001), Manufacturing Engineering and
Technology. 4th ed. Prentice-Hall.
Lowel, C. ve C. Blumstein, D. (1999), Sartor: Industrial Energy Efficiency, Clean
Rooms and Laboratories for high Technology industries. California Energy
Comission.
McFadden, R., (2008), A basic introduction to cleanrooms. Coastwide Laboratories.
Peterson, W.D., (2008), The Creation of Interoperable Integrated Circuits using
clean room design practice. Silicore Corporation Plymouth.
Rousseau, A. (2004), The Scottish Society for Contamination Control.
Whyte, W., (2002), Cleanroom Design, John Wiley andSons Inc., New York.
Egecell Fan Filtre birimleri (2009), HEPA/ULPA filtreler. Ege Nisan Ltd. Yenişehir,
İzmir. www.egenisan.com.
İkinci el temiz oda ekipmanı.www.bidservice.com.
ToolBox.com., Clean Rooms-ISO standard 14644. The Engineering ToolBox.
www.Engineering.
Wynnenvironmental (2008), www.wynenv.com.
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