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A METHOD OF PRECISE CALIBRATION FOR PIEZOELECTRICAL ACTUATORS

Journal Name:

  • Uludağ Üniversitesi Mühendislik-Mimarlık Fakültesi Dergisi

Publication Year:

  • 2004

Key Words:

Author NameUniversity of AuthorFaculty of Author
Abstract (2. Language): 
Piezoelectrical actuators are very useful for making translations over distance less than 10 μm. One of the most important applications of such piezo actuators is the scanning tunnelling microscopy and the related scanning probe microscopies because atomic scale distances have to be measured and controlled in scanning probe microscopies applications. Especially, tube shaped piezoelectrical actuators have been widely used for such purposes. In this study, a piezotube scanner is calibrated at three stages. First calibration was done by using interferometer. At the other two stages Scanning Tunnelling Microscope was used for measurement.
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FULL TEXT (PDF): 
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  • 1
147-152
  • English

REFERENCES

References: 

1. MÜLLER, F. et al., 1995. A Method for Contact-Free Calibration of Piezoelectrical Actuators, Rev. Sci. Instrum.
66 (9).
2. DECK, L., 1995. Accurate, Repetitive Motion from Biased Piezoelectric Actuators, Rev. Sci. Instrum. 66 (5).
3. HOLMAN, A. E. et al., 1995. Analysis of Piezo Actuators in Translation Constructions, Rev. Sci. Instrum. 66 (5).
4. PARK, S. and BARRETT, R. C., 1993. Design Considerations for an STM System. Methods of Experimental
Physics, Vol 27.
5. BONNELL, D, A. 1993. Scanning Tunneling Microscopy and Spectroscopy. Chapter 2.
6. PORTER, T. L., 1994. A Dual-Scan Piezo Element for Scanning Probe Microscopes. Rev. Sci. Instrum.65 (7).
7. SELLONI, A. et al., 1988. Scanning Tunneling Spectroscopy of Graphite and Interlates, Physica Scripta. Vol. 38,
297-300.

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